Characterization of multilayers by Fourier analysis of x-ray reflectivity

Journal of Applied Physics

Volumn 81, Issue 9, 1997, Pages 6112-6119

  Voorma, H J ^a   Louis, E ^a   Koster, N B ^a   Bijkerk, F ^a   Spiller, E ^b  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000880749     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364360     Document Type: Article

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