Thin multilayers characterization by grazing X-ray reflectometry and use of Fourier transform

Applied Surface Science

Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 12-16

  Bridou, F ^a   Gautier, J ^a   Delmotte, F ^a   Ravet, M F ^a   Durand, O ^b   Modreanu, M ^c  

^a INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^b Thales Reasearch and Technology   (France)

^c UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Fourier transform; Grazing; Multilayers

Indexed keywords

APPROXIMATION THEORY; CHARACTERIZATION; FOURIER TRANSFORMS; INTERFACES (MATERIALS); REFLECTOMETERS; SURFACE ROUGHNESS; X RAY ANALYSIS;

GRAZING; REFLECTIVITY CURVE; X-RAY REFLECTOMETRY;

MULTILAYERS;

EID: 33751068722     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.05.122     Document Type: Article

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