Experimental optimization of electrodes for high Q, high frequency HBAR

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2009, Pages 2107-2110

  Baumgartel, Lukas ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MOLYBDENUM;

DEPOSITION CONDITIONS; ELECTRODE THICKNESS; EXPERIMENTAL OPTIMIZATION; FABRICATED DEVICE; FABRICATION TECHNIQUE; HIGH FREQUENCY HF; HIGH-OVERTONE BULK ACOUSTIC RESONATORS; MOLYBDENUM ELECTRODES;

ELECTRODES;

EID: 77952831885     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2009.5441814     Document Type: Conference Paper

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