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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 1-5

Growth of highly c-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonators

(3) Lee, Si Hyung a,b Lee, Jeon Kook a Yoon, Ki Hyun b

a Korea Institute of Science and Technology (South Korea)

b Yonsei University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; DEPOSITION; ELECTRODES; FILM GROWTH; MAGNETRON SPUTTERING; MOLYBDENUM; MORPHOLOGY; PRESSURE EFFECTS; STRESSES; STRUCTURE (COMPOSITION); TEXTURES; THIN FILMS;

BULK ACOUSTIC WAVE RESONATORS; REACTIVE MAGNETRON SPUTTERING; SPUTTERING PRESSURE;

ALUMINUM NITRIDE;

EID: 0037279010 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1521961 Document Type: Article

Times cited : (69)

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