Electrode effects on general modes in high-overtone bulk acoustic resonators

Ultrasonics

Volumn 44, Issue SUPPL., 2006, Pages

  Zhang, Hui ^a   Zhang, Shu yi ^a   Zheng, Kai ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Effective electromechanical coupling factor; HBAR; Piezo film

Indexed keywords

ACOUSTIC IMPEDANCE; ELECTRODES; ELECTROMECHANICAL DEVICES; RESONANCE; SPECTROSCOPIC ANALYSIS; THIN FILMS;

EFFECTIVE ELECTROMECHANICAL COUPLING FACTORS; ELECTRODE EFFECTS; ELECTROMECHANICAL COUPLING FACTORS; METAL ELECTRODES;

ACOUSTIC RESONATORS;

EID: 33845709217     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2006.05.085     Document Type: Article

References (8)

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