Electrode effects on frequency spectra and electromechanical coupling factors of HBAR

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 6, 2005, Pages 1020-1025

  Zhang, Hui ^a   Wang, Zuoqing ^a,b,c,d   Zhang, Shu Yi ^a,e,f  

^a NANJING UNIVERSITY   (China)

^b MCGILL UNIVERSITY   (Canada)

^c UNIVERSITÉ DE SHERBROOKE   (Canada)

^d Gina Cody School of Engineering and Computer Science   (Canada)

^e NJU   (China)

^f Academic Committee   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING FACTORS; FREQUENCY CONTROL; FREQUENCY SPECTRA; RESONANCE FREQUENCIES;

ACOUSTIC IMPEDANCE; COMPUTER SIMULATION; ELECTRODES; ELECTROMECHANICAL FILTERS; FREQUENCIES; PARAMETER ESTIMATION; RESONATORS;

ACOUSTIC BULK WAVE DEVICES;

EID: 23244456331     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1504024     Document Type: Article

References (15)

1. M. M. Driscoll, R. A. Jelen, and N. Matthews, "Extremely low phase noise UHF oscillators utilizing high-overtone, bulk acoustic resonators," in Proc. IEEE Ultrason. Symp., 1990, pp. 513-518.
2. D. S. Balley, M. M. Driscoll, and R. A. Jelen, "Frequency stability of high-overtone bulk acoustic resonators," in Proc. IEEE Ultrason. Symp., 1990, pp. 509-512.
3. J. Rosenbaum, H. L. Salvo, Jr., and S. V. Krishnaswamy, "Overtone response of composite bulk acoustic resonators," in Proc. 40th Annu. Freq. Contr. Symp., 1986, pp. 206-210.
4. st Annu. Freq. Contr. Symp., 1987, pp. 388-390.
5. F. S. Hickernell, "Measurement techniques for evaluating piezoelectric thin films," in Proc. IEEE Ultrason. Symp., 1996, pp. 235-242.
6. B. S. Naik, J. J. Lutsky, R. Rief, and C. D. Sodini, " Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, no.1, pp. 257-263, 1998.
7. Z. Wang, Y. Zhang, and J. D. N. Cheeke, "Characterization of electromechanical coupling coefficient of piezoelectric film using composite resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, no.5, pp. 1327-1330, 1999.
8. Y. Zhang, Z. Wang, and J. D. N. Cheeke, "Resonant spectrum method to characterize piezoelectric films in composite resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, no.3, pp. 321-333, 2003.
9. S.-Y. Pao, M.-C. Chao, Z. Wang, C.-H. Chiu, K.-C. Lan, Z.-N. Hung, L.-R. Shih, and C.-L. Wang, "Analysis and experiment of HBAR frequency spectra and applications to characterize the piezoelectric thin film and to HBAR design," in Proc. IEEE Int. Freq. Contr., 2002, pp. 27-35.
10. J. D. Larson, III, P. D. Bradley, S. Wartenberg, and R. C. Ruby, "Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system," in Proc. IEEE Ultrason. Symp., 2000, pp. 863-868.
11. P. Osbond, C. M. Beck, C. J. Brierley, M. R. Cox, S. P. Marsh, and N. M. Shorrocks, "The influence of ZnO and electrode thickness on performance of thin film bulk acoustic wave resonators," in Proc. IEEE Ultrason. Symp., 1999, pp. 911-914.
12. K. M. Lakin, J. Belsick, J. F. McDonald, and K. T. McCarron, "Improved bulk wave resonator coupling coefficient for wide bandwidth filters," in Proc. IEEE Ultrason. Symp., 2001, pp. 827-831.
13. K. M. Lakin, "Equivalent circuit modeling of stacked crystal filters," in Proc. 35th Annu. Symp. Freq. Contr., 1981, pp. 257-262.
14. K. T. McCarron, G. R. Kline, J. T. Martin, and K. M. Lakin, "Growth and characterization of aluminum nitride thin films for piezoelectric devices," in Proc. IEEE Ultrason. Symp., 1988, pp. 673-676.
15. IEEE Standard on Piezoelectricity, (ANSI/IEEE Standard 176-1987), 1996.