Simulation and experimental measurements of High-overtoned Bulk Acoustic Resonators (H-BAR)

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2005, Pages 1183-1186

  Alzuaga, S ^a   Friedt, J M ^a   Ballandras, S ^a   Masson, J ^a   Robert, L ^a   Bazin, N ^a   Guichardaz, B ^a   Gachon, D ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ALUMINUM COMPOUNDS; COMPUTER SIMULATION; PIEZOELECTRIC MATERIALS; Q FACTOR MEASUREMENT;

HIGH OVERTONE BULK ACOUSTIC RESONATORS (HBAR); LONGITUDINAL WAVES; MICROWAVE STABILIZATION;

RESONATORS;

EID: 33847151646     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603062     Document Type: Conference Paper

References (6)

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2. W. Pang, H. Zhang, J. Kim, H. Yu and E. Kim, High Q Single-Mode High-Tone Bulk Acoustic Resonator Integrated with Surface-Micromachined FBARs Filter, IEEE MTT Proceedings, 2005.
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6. G.R. Kline, K. M. Lakin, and K.T. McCarron, Overomded High Q Resonators for Microwave Oscillators, IEEE International Frequency Control Symposium, pp. 718-721, 1993.