Acoustic HBAR spectroscopy of metal (W, Ti, Mo, Al) thin films

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 415-418

  Mansfeld, G D ^a   Alekseev, S G ^a   Kotelyansky, I M ^a  

^a MIREA RUSSIAN TECHNOLOGICAL UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC WAVE VELOCITY; ALUMINUM; ATTENUATION; MAGNETRON SPUTTERING; MOLYBDENUM; THIN FILMS; TITANIUM; TUNGSTEN;

ACOUSTIC WAVE ATTENUATION; ATTENUATION COEFFICIENT; HIGH OVERTONE BULK ACOUSTIC WAVE SPECTROSCOPY; THERMAL EVAPORATION;

ACOUSTIC SPECTROSCOPY;

EID: 0035728975     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2001.991652     Document Type: Article

References (5)

1. BAW composite resonator spectroscopy