A depletion layer actuator

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1393-1396

  Ransley, James H T ^a   Durkan, Colm ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Actuators; Cantilevers; CMOS compatible mieromechanical resonators; MEMS Oscillators

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PHOTORESISTS; RESONATORS; SENSORS; TRANSDUCERS;

CANTILEVERS; CMOS COMPATIBLE MIEROMECHANICAL RESONATORS; CMOS PROCESSING; DEPLETION LAYERS; INTERNATIONAL CONFERENCES; MEMS OSCILLATORS; MEMS RESONATORS; SOLID-STATE SENSORS; TOP SURFACE;

ELECTROSTATIC ACTUATORS;

EID: 50049095009     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300403     Document Type: Conference Paper

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