SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics

Volumn 48, Issue 8 Part 1, 2009, Pages 0811021-0811024

Effect of plasma conditions on the growth of GaNAs by plasma-assisted molecular-beam epitaxy

(3) Uchiyama, Masayuki a Ishikawa, Fumitaro a Kondow, Masahiko a

a OSAKA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METASTABLE MOLECULES; NITROGEN GAS FLOW; NITROGEN INCORPORATION; OPTICAL CHARACTERISTICS; PLASMA CONDITIONS; PLASMA MODE; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; RF-POWER;

AERODYNAMICS; ATOMS; CRYSTAL GROWTH; FLOW OF GASES; GALLIUM ALLOYS; IONS; MOLECULAR BEAMS; NITROGEN; OPTICAL PROPERTIES; PLASMA THEORY; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING;

NITROGEN PLASMA;

EID: 77952720952 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.081102 Document Type: Article

Times cited : (6)

References (14)

1
- 0030079777
- M. Kondow, K. Uomi, A. Niwa, T. Kitatani, S. Watahiki, and Y. Yazawa: Jpn. J. Appl. Phys. 35 (1996) 1273.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 1273
- Kondow, M.¹ Uomi, K.² Niwa, A.³ Kitatani, T.⁴ Watahiki, S.⁵ Yazawa, Y.⁶

2
- 63349095729
- J. Jewell, L. Graham, M. Crom, K. Maranowski, J. Smith, T. Fanning, and M. Schnoes: Phys. Status Solidi C 5 (2008) 2951.
- (2008) Phys. Status Solidi C , vol.5 , pp. 2951
- Jewell, J.¹ Graham, L.² Crom, M.³ Maranowski, K.⁴ Smith, J.⁵ Fanning, T.⁶ Schnoes, M.⁷

3
- 0036724144
- J. M. Reisnider, S. Govindaraju, and A. L. Holmes, Jr.: J. Cryst. Growth 243 (2002) 396.
- (2002) J. Cryst. Growth , vol.243 , pp. 396
- Reisnider, J.M.¹ Govindaraju, S.² Holmes Jr., A.L.³

4
- 0037347087
- H. Carrère, A. Arnoult, A. Ricard, X. Marie, T. Amand, and E. Bedel-Pereira: Solid-State Electron. 47 (2003) 419.
- (2003) Solid-State Electron. , vol.47 , pp. 419
- Carrère, H.¹ Arnoult, A.² Ricard, A.³ Marie, X.⁴ Amand, T.⁵ Bedel-Pereira, E.⁶

5
- 34247261060
- V. A. Grant, R. P. Campion, C. T. Foxon, W. Lu, S. Chao, and E. C. Larkins: Semicond. Sci. Technol. 22 (2007) 15.
- (2007) Semicond. Sci. Technol. , vol.22 , pp. 15
- Grant, V.A.¹ Campion, R.P.² Foxon, C.T.³ Lu, W.⁴ Chao, S.⁵ Larkins, E.C.⁶

6
- 18444388311
- M. A. Wistey, S. R. Bank, H. B. Yuen, H. Bae, and J. S. Harris, Jr.: J. Cryst. Growth 278 (2005) 229.
- (2005) J. Cryst. Growth , vol.278 , pp. 229
- Wistey, M.A.¹ Bank, S.R.² Yuen, H.B.³ Bae, H.⁴ Harris Jr., J.S.⁵

7
- 5444228226
- J. Miguel-Sánchez, A. Guzmán, and E. Muñoz: Appl. Phys. Lett. 85 (2004) 1940.
- (2004) Appl. Phys. Lett. , vol.85 , pp. 1940
- Miguel-Sánchez, J.¹ Guzmán, A.² Muñoz, E.³

8
- 0035870961
- S. G. Spruytte, C. W. Coldren, J. S. Harris, W. Wampler, P. Krispin, K. Ploog, and M. C. Larson: J. Appl. Phys. 89 (2001) 4401.
- (2001) J. Appl. Phys. , vol.89 , pp. 4401
- Spruytte, S.G.¹ Coldren, C.W.² Harris, J.S.³ Wampler, W.⁴ Krispin, P.⁵ Ploog, K.⁶ Larson, M.C.⁷

9
- 0037091706
- W. K. Loke, S. F. Yoon, S. Z. Wang, T. K. Ng, and W. J. Fan: J. Appl. Phys. 91 (2002) 4900.
- (2002) J. Appl. Phys. , vol.91 , pp. 4900
- Loke, W.K.¹ Yoon, S.F.² Wang, S.Z.³ Ng, T.K.⁴ Fan, W.J.⁵

10
- 0036572527
- L. Grenouillet, C. Bru-Chevallier, G. Guillot, P. Gilet, P. Ballet, P. Duvaut, G. Rolland, and A. Million: J. Appl. Phys. 91 (2002) 5902.
- (2002) J. Appl. Phys. , vol.91 , pp. 5902
- Grenouillet, L.¹ Bru-Chevallier, C.² Guillot, G.³ Gilet, P.⁴ Ballet, P.⁵ Duvaut, P.⁶ Rolland, G.⁷ Million, A.⁸

11
- 1842788593
- M. Ramsteiner, D. S. Jiang, J. S. Harris, and K. H. Ploog: Appl. Phys. Lett. 84 (2004) 1859.
- (2004) Appl. Phys. Lett. , vol.84 , pp. 1859
- Ramsteiner, M.¹ Jiang, D.S.² Harris, J.S.³ Ploog, K.H.⁴

12
- 36049006467
- M. M. Oye, T. J. Mattord, G. A. Hallock, S. R. Band, M. A. Wistey, A. J. Ptak, H. B. Yuen, J. S. Harris, Jr., and A. L. Holmes, Jr.: Appl. Phys. Lett. 91 (2007) 191903.
- (2007) Appl. Phys. Lett. , vol.91 , pp. 191903
- Oye, M.M.¹ Mattord, T.J.² Hallock, G.A.³ Band, S.R.⁴ Wistey, M.A.⁵ Ptak, A.J.⁶ Yuen, H.B.⁷ Harris Jr., J.S.⁸ Holmes Jr., A.L.⁹

13
- 63349106359
- F. Ishikawa, S. D. Wu, M. Kato, M. Uchiyama, K. Higashi, and M. Kondow: J. Cryst. Growth 311 (2009) 1646.
- (2009) J. Cryst. Growth , vol.311 , pp. 1646
- Ishikawa, F.¹ Wu, S.D.² Kato, M.³ Uchiyama, M.⁴ Higashi, K.⁵ Kondow, M.⁶

14
- 0003973002
- Springer, Berlin
- G. Bauer and W. Richter: Optical Characterization of Epitaxial Semiconductor Layers (Springer, Berlin, 1996) p. 321.
- (1996) Optical Characterization of Epitaxial Semiconductor Layers , pp. 321
- Bauer, G.¹ Richter, W.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.