Surface analysis of carbon-hydrogen bonds in diamondlike carbon films by X-ray photoelectron spectroscopy

Japanese Journal of Applied Physics

Volumn 48, Issue 9 Part 1, 2009, Pages 0923041-0923045

  Takabayashi, Susumu ^a   Okamoto, Keishi ^a,b   Nakatani, Tatsuyuki ^b   Sakaue, Hiroyuki ^a   Takahagi, Takayuki ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

^b Toyo Advanced Technologies Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; ANALYTICAL TOOL; CARBON-CARBON BOND; CARBON-HYDROGEN BOND; DLC FILM; ELASTIC RECOIL DETECTION ANALYSIS; EMISSION ANGLE; HYDROGEN CONCENTRATION; HYDROGEN DISTRIBUTION; UNBALANCED MAGNETRON SPUTTERING; XPS;

DIAMOND LIKE CARBON FILMS; HYDROGEN; HYDROGEN BONDS; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; SPECTRUM ANALYSIS; SURFACE ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 77952702673     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.092304     Document Type: Article

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