Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma

Applied Surface Science

Volumn 252, Issue 24, 2006, Pages 8589-8592

  Shinohara, Masanori ^a   Iwatsuji, Keitaro ^a   Katagiri, Teruaki ^a   Shibata, Hiromichi ^a   Matsuda, Yoshinobu ^a   Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

Hydrocarbon species; Infrared absorption spectroscopy; Thermal annealing

Indexed keywords

ANNEALING; INFRARED SPECTROSCOPY; REFLECTION; SILICON; SURFACE PROPERTIES; THERMOANALYSIS;

HYDROCARBON SPECIES; INFRARED ABSORPTION SPECTROSCOPY; THERMAL ANNEALING;

HYDROCARBONS;

EID: 33748970818     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.11.075     Document Type: Article

References (15)

1. Shinohara M., Kuwano T., Kimura Y., and Niwano M. Thin Solid films 435 (2003) 13
2. Shinohara M., Kuwano T., Akama Y., Kimura Y., Niwano M., Ishida H., and Hatakeyama R. J. Vac. Sci. Technol. A 21 (2003) 25
3. Tallant D.R., Parmeter J.E., Siegal M.P., and Simpson R.L. Diamond Relat. Mater. 4 (1995) 191
4. Camargo Jr. S.S., Santos R.A., and Beyer W. Diamond Relat. Mater. 9 (2000) 658
5. Nakazawa H., Yamagata Y., Suemitsu M., and Mashita M. Thin Solid Films 467 (2004) 98
6. Shinohara M., Katagiri T., Iwatsuji K., Matsuda Y., Fujiyama H., Kimura Y., and Niwano M. Thin Solid films 464-465 (2004) 14
7. Harrick N.J. Internal Reflection Spectroscopy (1967), Wiley, New York second printing, Harrick Scientific Corporation, Ossining, 1979
8. Mirabella Jr. F.M., and Harrick N.J. Internal Reflection Spectroscopy: Review and Supplement (1985), Harrick Scientific Corporation, Ossining
9. Chabal Y.J. Surf. Sci. Rep. 8 (1988) 211
10. Shinohara M., Shoji D., Maehama T., Akama Y., and Niwano M. Electron. Commun. Jpn. Part II: Electron. 85 (2002) 59
11. Shinohara M., Kimura Y., Shoji D., and Niwano M. Appl. Surf. Sci. 175-176 (2001) 591
12. M. Shinohara, T. Katagiri, K. Iwatsuji, Y. Matsuda, H. Fujiyama, Thin Solid Films, in press.
13. Vanhulsel A., Celis J.-P., Dekempeneer E., Meneve J., Smeets J., and Vercammen K. Diamond Relat. Mater. 8 (1999) 1193
14. Socrates G. Infrared and Raman Characteristic Group Frequencies (2001), Wiley, Chichester
15. Robertson J. Mater. Sci. Eng. R-Rep. 37 (2002) 129