Hydrogen depth profiling with sub-nm resolution in high-resolution ERD

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 140, Issue 3-4, 1998, Pages 397-401

  Kimura, Kenji ^a   Nakajima, Kaoru ^a   Imura, Hideki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Elastic recoil detection; High resolution; Hydrogen

Indexed keywords

IONS; NUCLEAR INSTRUMENTATION; SPECTROMETERS;

DEPTH PROFILING; ELASTIC RECOIL DETECTION (ERD) SYSTEMS;

HYDROGEN;

EID: 0032070461     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00105-0     Document Type: Article

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