Electron energy loss and diffraction of backscattered electrons from silicon

New Journal of Physics

Volumn 12, Issue , 2010, Pages

  Winkelmann, Aimo ^a   Aizel, Koceila ^b   Vos, Maarten ^b  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; ELECTRON ENERGY LEVELS; ENERGY DISSIPATION; GEOMETRY; INELASTIC SCATTERING; SILICON;

BACKSCATTERED ELECTRONS; DEPENDENT OBSERVATIONS; DIFFRACTION CONTRAST; DYNAMICAL DIFFRACTION; ELASTIC AND INELASTIC SCATTERING; ELECTRON ENERGY LOSS; GRAZING INCIDENCE ANGLE; SCATTERING GEOMETRIES;

ELECTRONS;

EID: 77952651224     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/12/5/053001     Document Type: Article

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