Individually controlled multi-focus laser processing for two-photon polymerization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7584, Issue , 2010, Pages

  Obata, Kotaro ^a   Koch, Jürgen ^a   Chichkov, Boris N ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

CGH; Computer generated hologram; Femtosecond laser; Multi focus spots; Parallel processing; Phase modulation; Two photon polymerization

Indexed keywords

COMPUTER GENERATED HOLOGRAMS; FEMTO-SECOND LASER; MULTI-FOCUS; MULTI-FOCUS SPOTS; PARALLEL PROCESSING; TWO PHOTON POLYMERIZATION;

COMPUTER CONTROL SYSTEMS; COMPUTER GENERATED HOLOGRAPHY; HOLOGRAMS; LIGHT MODULATION; LITHOGRAPHY; MICROELECTRONICS; PHASE MODULATION; PHOTONS; POLYMERIZATION; POLYMERS; PULSED LASER APPLICATIONS; ULTRASHORT PULSES;

LIGHT MODULATORS;

EID: 77951554986     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.842117     Document Type: Conference Paper

References (32)

1. D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
2. H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
3. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
4. K. M. davis, K. Miura, N. Sugimoto, and K. Hirao, Opt. Lett. 21, 1729 (1996).
5. E. N. Glezer, M. Milosavljevic, L. Juang, R. J. Finlay, T. -H. Her, J. P. Callan, and E. Mazur, Opt. Lett. 21, 2023 (1996).
6. M. Will, S. Nolte, B. N. Chichkov, and A. Tuennermann, Appl. Opt. 41, 4360 (2002).
7. S. Maruo, O. Nakamura, and S. Kawata, Opt. Lett. 22, 132 (1997).
8. H. -B. Sun, S. Matsuo, and H. Misawa, Appl. Phys. Lett. 74, 786 (1999).
9. B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I. -Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X. -L. Wu, S. R. Marder, and J. W. Perry, Nature 398, 51 (1999).
10. S. Kawata, H. -B. Sun, T. Tanaka, and K. Takada, Nature 412, 697 (2001).
11. J. Serbin, A. Ovsianikov, and B. Chichkov, Opt. Express 12, 5221 (2004).
12. R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, Opt. Express 14, 810 (2006).
13. C. Reinhardt, S. Passinger, and B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, Opt. Lett. 31, 1307 (2006).
14. S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. -A, Kolb, H. Haferkamp, B. N. Chichkov, J. Biomater. Appl. 22, 275 (2007).
15. A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, J. Tissue Eng. Regen. Med. 1, 443 (2007).
16. K. Takada, H. -B. Sun, S. Kawata, Appl. Phys. Lett. 86, 71122 (2005).
17. K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, Appl. Phys. Lett. 89, 24106 (2006).
18. W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, Opt. Express 15, 3426 (2007).
19. J. Kato, N. Takeyasu, Y. Adachi, H. -B. Sun, and S. Kawata, Appl. Phys. Lett. 86, 44102 (2005).
20. Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2, 42, L1452 (2003).
21. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, Appl. Phys. Lett. 85, 2758 (2003).
22. X. Dong, Z. Zhao, and X. Duan, Appl. Phys. Lett. 91, 124103 (2007)
23. L. Kelemen, S. Valkai, and P. Ormos, Opt. Express 15, 14488 (2007).
24. Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 31101 (2005).
25. S. Hasegawa, Y. Hayasaki, and N. Nishida, Opt. Lett. 31, 1705 (2006).
26. H. Takahashi, S. Hasegawa, and Y Hayasaki, Appl. Opt. 46, 5917 (2007).
27. H. Takahashi, S. Hasegawa, A Takita, and Y. Hayasaki, Opt. Express 16, 16592 (2008).
28. K. Obata, S. Passinger, A. Ostendorf, and B. Chichkov, Proceedings of the International Congress of ICALEO 2007, p. 29.
29. Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 225, 2284 (2008).
30. Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, Appl. Surf. Sci. 225, 6582 (2008).
31. J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, Appl. Opt. 45, 897 (2006).
32. F. Kahlenburg and M. Popall, Mater. Res. Soc. Symp. Proc. 847, EE14.4.1 (2005).