Sparse-exposure technique in holographic two-photon polymerization

Optics Express

Volumn 16, Issue 21, 2008, Pages 16592-16599

  Takahashi, Hidetomo ^a   Hasegawa, Satoshi ^b   Takita, Akihiro ^b   Hayasaki, Yoshio ^a,b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b UTSUNOMIYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON HOLOGRAPHY; FABRICATION; HOLOGRAMS; IRRADIATION; LASER PULSES; LIGHT MODULATORS; LIQUID CRYSTALS; PHOTONS; POLYMERIZATION;

COMPUTER GENERATED HOLOGRAMS; FABRICATION THROUGHPUT; FEMTOSECOND LASER PULSE IRRADIATION; LINEAR STRUCTURES; LIQUID CRYSTAL SPATIAL LIGHT MODULATORS; PHOTOSENSITIVE MATERIALS; SPACE VARIANTS; TWO PHOTON POLYMERIZATION;

COMPUTER GENERATED HOLOGRAPHY;

NANOMATERIAL; POLYMER;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; HOLOGRAPHY; INSTRUMENTATION; OPTICAL INSTRUMENTATION; PHOTON; ULTRASTRUCTURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; HOLOGRAPHY; NANOSTRUCTURES; OPTICAL DEVICES; PHOTONS; POLYMERS;

EID: 54249122132     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/oe.16.016592     Document Type: Article

References (22)

1. S. Maruo, O. Nakamura, and S. Kawata, "Three-dimensional microfabrication with two-photon-absorbed photopolymerization," Opt. Lett. 22, 132-134 (1997).
2. H. -B. Sun, S. Matsuo, and H. Misawa, "Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin," Appl. Phys. Lett. 74, 786-788 (1999).
3. H. -B. Sun, T. Tanaka, and S. Kawata, "Three-dimensional focal spots related to two-photon excitation," Appl. Phys. Lett. 80, 3673-3675 (2002).
4. H. -B. Sun, M. Maeda, K. Takada, J. W. M. Chon, M. Gu, and S. Kawata, "Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization," Appl. Phys. Lett. 83, 819-821 (2003).
5. J. Serbin, A. Egbert, A. Ostendorf, B. N. Chickov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics," Opt. Lett. 28, 301-303 (2003).
6. V. Mizeikis, K. K. Seet, S. Juodkazis, and H. Misawa, "Three-dimensional woodpile photonic crystal templates for the infrared spectral range," Opt. Lett. 29, 2061-2063 (2004).
7. S. H. Park, T. W. Lim, D. -Y. Yang, N. C. Cho, and K. -S. Lee, "Fabrication of a bunch of sub-30-nm nanofibers inside micrcchannels using photopolymerization via a long exposure technique," Appl. Phys. Lett. 89, 173133 (2006).
8. D. Tan, Y. Li, F. Qi, H. Yang, Q. Gong, X. Dong, and X. Duan, "Reduction in feature size of two-photon polymerization using SCR500," Appl. Phys. Lett. 90, 071106 (2007).
9. J. -F. Xing, X. -Z. Dong, W. -Q. Chen, X. -M. Duan, N. Takeyasu, T. Tanaka, and S. Kawata, "Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency," Appl. Phys. Lett. 90, 131106 (2007).
10. Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka, and K. Hirao, "Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements," Opt. Exp. 12, 1908-1915 (2004).
11. S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser microfabrication of periodic structures using a microlens array," Appl. Phys. A 80, 683-685 (2005).
12. J. Kato, N. Takeyasu, Y. Adachi, H. -B. Sun, and S. Kawata, "Multiple-spot parallel processing for laser micronanofabrication," Appl. Phys. Lett., 86, 044102 (2005).
13. Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, "Variable holographic femtosecond laser processing by use of a spatial light modulator," Appl. Phys. Lett. 87, 031101 (2005).
14. S. Hasegawa, Y. Hayasaki, and N. Nishida, "Holographic femtosecond laser processing with multiplexed phase Fresnel lenses," Opt. Lett. 31, 1705-1707 (2006).
15. S. Hasegawa and Y. Hayasaki, "Holographic femtosecond laser processing with multiplexed phase fresnel lenses displayed on a liquid crystal spatial light modulator," Opt. Rev. 14, 208-213 (2007).
16. L. Kelemen, S. Valkai, and P. Ormos, "Parallel photopolymerisation with complex light patterns generated by diffractive optical elements," Opt. Express 15, 14488-14497 (2007).
17. Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N, Mukohzaka, Y. Kobayashi, and T. Hara, "High efficiency electrically-addressable phase-only spatial light modulator," Opt. Rev. 6, 339-344 (1999).
18. J. Bengtsson, "Kinoform design with an optimal-rotation-angle method," Appl. Opt. 33, 6879-6884 (1994).
19. H. Takahashi, S. Hasegawa, and Y. Hayasaki, "Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator," Appl. Opt. 46, 5917-5923 (2007).
20. K. Chaen, H. Takahashi, S. Hasegawa, and Y. Hayasaki, "Display method with compensation of the spatial frequency response of a liquid crystal spatial light modulator for holographic femtosecond laser processing," Opt. Commun., 280, 165-172 (2007).
21. K. K. Seet, V. Mizeikis, S. Juodkazis, and H. Misawa, "Three-dimensional horizontal circular spiral photonic crystals with stop gaps below μim," Appl. Phys. Lett. 88, 221101 (2006).
22. H. Segawa, S. Yamaguchi, Y. Yamazaki, T. Yano, S. Shibata, and H. Misawa, "Top-gathering pillar array of hybrid organic-inorganic material by means of self-organization," Appl. Phys. A 83, 447-451 (2006).