Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator

Applied Optics

Volumn 46, Issue 23, 2007, Pages 5917-5923

  Takahashi, Hidetomo ^a   Hasegawa, Satoshi ^a   Hayasaki, Yoshio ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION PATTERNS; FREQUENCY RESPONSE; HOLOGRAPHY; LIGHT MODULATION; LIQUID CRYSTALS; ROTATION;

COMPUTER-GENERATED HOLOGRAM (CGH); HOLOGRAPHIC FEMTOSECOND LASER PROCESSING; LIQUID CRYSTAL SPATIAL LIGHT MODULATORS; OPTIMAL-ROTATION-ANGLE;

ULTRASHORT PULSES;

EID: 35948945712     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.005917     Document Type: Article

References (24)

1. 2 with pulse widths from 7 ns to 150 fs," Appl. Phys. Lett. 64, 3071-3073 (1994).
2. H. Kumagai, R. Midorikawa, R. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm," Appl. Phys. Lett. 65, 1850-1852 (1994).
3. R. M. Davis, R. Miura, N. Sugimoto, and R. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, 1729-1731 (1996).
4. B. N. Chichkov, C. Momma, S. Noite, F. von Alvensleben, and A. Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996).
5. E. N. Glezer and E. Mazur, "Ultrafast-laser driven micro-explosions in transparent materials," Appl. Phys. Lett. 71, 882-884 (1997).
6. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, "Three-dimensional optical storage inside transparent materials," Opt. Lett. 21, 2023-2025 (1996).
7. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and R. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett. 71, 3329-3331 (1997).
8. J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, "Waveguide fabrication in phosphate glasses using femtosecond laser pulses," Appl. Phys. Lett. 82, 2371-2373 (2003).
9. K. Yamada, W. Watanabe, Y. Li, K. Itoh, and J. Nishii, "Multilevel phase-type diffractive lenses in silica glass induced by filamentation of femtosecond laser pulses," Opt. Lett. 29, 1846-1848 (2004).
10. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses," Appl. Phys. Lett. 82, 2758-2760 (2003).
11. S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser microfabrication of periodic structures using a microlens array," Appl. Phys. A 80, 683-685 (2005).
12. Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka, and K. Hirao, "Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements," Opt. Express 12, 1908-1915 (2004).
13. Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, "Variable holographic femtosecond laser processing by use of a spatial light modulator," Appl. Phys. Lett. 87, 031101 (2005).
14. S. Hasegawa, Y. Hayasaki, and N. Nishida, "Holographic femtosecond laser processing with multiplexed phase Fresnel lenses," Opt. Lett. 31, 1705-1707 (2006).
15. N. Sanner, N. Huot, E. Audouard, C. Larat, J. P. Huignard, and B. Loiseaux, "Programmable focal spot shaping of amplified femtosecond laser pulses," Opt. Lett. 30, 1479-1481 (2005).
16. N. Sanner, N. Huot, E. Audouard, C. Larat, P. Laporte, and J. P. Huignard, "100-kHz diffraction-limited femtosecond laser micromachining," Appl. Phys. B 80, 27-30 (2005).
17. G. Mínguez-Vega, J. Lancis, J. Caraquitena, V. Torres-Company, and P. Andrés, "High spatiotemporal resolution in multifocal processing with femtosecond laser pulses," Opt. Lett. 31, 2631-2633 (2006).
18. J. Bengtsson, "Rinoform design with an optimal-rotation-angle method," Appl. Opt. 33, 6879-6884 (1994).
19. R. Neubecker, G.-L. Oppo, B. Thuering, and T. Tschudi, "Pattern formation in a liquid-crystal light valve with feedback, including polarization, saturation, and internal threshold effects," Phys. Rev. A 52, 791-808 (1994).
20. Y. Hayasaki, H. Yamamoto, and N. Nishida, "Self-scanning of isolated spots in a nonlinear optical system with two-dimensional feedback," J. Opt. Soc. Am. B 17, 1211-1215 (2000).
21. Y. Hayasaki, S. Hara, H. Yamamoto, and N. Nishida, "Spatial and temporal properties of a nonlinear optical feedback system," Opt. Rev. 8, 343-347 (2001).
22. Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, "High efficiency-addressable phase-only spatial light modulator," Opt. Rev. 6, 339-344 (1999).
23. D. Rawamura, A. Takita, Y. Hayasaki, and N. Nishida, "Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating," Appl. Phys. A 82, 523-527 (2006).
24. D. Kawamura, A. Takita, Y. Hayasaki, and N. Nishida, "Bump formation on a glass surface with a transparent coating using femtosecond laser processing," Appl. Phys. A 85, 39-43 (2006).