Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing

Applied Physics Letters

Volumn 91, Issue 12, 2007, Pages

  Dong, Xian Zi ^a,b   Zhao, Zhen Sheng ^a   Duan, Xuan Ming ^a  

^a TECHNICAL INSTITUTE OF PHYSICS AND CHEMISTRY   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES; MICROSTRUCTURE; PARALLEL PROCESSING SYSTEMS; PHOTONIC CRYSTALS; POLYMERIZATION;

APERTURE MASKS; MICRONANOFABRICATION; MULTIPLE BEAMS;

MULTIPHOTON PROCESSES;

EID: 34648828940     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2789661     Document Type: Article

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