Development of a flexure hinge-based stack-type five-degrees-of-freedom nanometre-scale stage for a heavy-loading machining process

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 221, Issue 3, 2007, Pages 379-385

  Jywe, Wenyuh ^a   Liu, Chien Hung ^a   Teng, Yun Feng ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Capacitive sensors; Flexible piezoelectric actuator; Laser interferometer

Indexed keywords

CAPACITANCE; DEGREES OF FREEDOM (MECHANICS); LASER INTERFEROMETRY; LOADING; PIEZOELECTRIC ACTUATORS; SENSORS;

HEAVY-LOADING MACHINE; LASER INTERFEROMETERS; QUICK RESPONSE;

MACHINING;

EID: 34250833471     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544054JEM487     Document Type: Article

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