Piezoactuators for motion control from centimeter to nanometer

IEEE International Conference on Intelligent Robots and Systems

Volumn 1, Issue , 2000, Pages 492-497

  Breguet, J M ^a   Perez R ^a   Bergander, A ^a   Schmitt, C ^a   Clavel, R ^a   Bleuler, H ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; DEFORMATION; DEGREES OF FREEDOM (MECHANICS); ELECTRIC POWER SUPPLIES TO APPARATUS; FEEDBACK CONTROL; MECHANICAL PROPERTIES; PIEZOELECTRIC DEVICES;

MECHANICAL AMPLIFICATION; MONOLITHIC TWO-DEGREES-OF-FREEDOM ACTUATOR; PIEZOACTUATORS; SCANNING PROBE MICROSCOPY; STICK AND SLIP ACTUATOR;

MOTION CONTROL;

EID: 0034446258     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Monolithic piezoceramics flexible structures for micromanipulation
2. Monolithic piezoceramic micro-actuators
3. Stick and slip actuators and parallel architectures dedicated to microrobotics
4. Monolithic piezo-actuators: Modelling, validation in the laboratory and optimisation of working conditions
5. 3 piezoceramics with compressive uniaxial stresses and its links to the effect of dopants on the stability of the polarisations in the materials
6. New designs for long range, high resolution, multi-degrees-of-freedom piezoelectric actuators
7. Stick-slip actuators for micromachining of glass