A novel 5DOF thin coplanar nanometer-scale stage

Precision Engineering

Volumn 32, Issue 4, 2008, Pages 239-250

  Jywe, Wen Yuh ^a   Jeng, Yeau Ren ^b   Liu, Chien Hung ^a   Teng, Yun Feng ^b   Wu, Chia Hung ^c   Wang, Hung Shu ^c   Chen, Yi Jou ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Flexure hinge; Nanometer stage; Piezoelectric; Positioning control; Stack type stage

Indexed keywords

FLEXIBLE STRUCTURES; INDUSTRIAL ENGINEERING; KETONES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; PROCESS ENGINEERING;

CAPACITIVE SENSORS; CONTROLLER DESIGN METHODS; FLEXIBLE BODY (FB); HIGH ACCURACY; MANUFACTURING PROCESSES; NANO-METER-SCALE; ROTATIONAL ANGLES; ROTATIONAL MOTIONS;

STAGES;

EID: 48549097322     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.11.001     Document Type: Review

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