On the modeling of dielectric charging in RF-MEMS capacitive switches

2010 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2010 - Digest of Papers

Volumn , Issue , 2010, Pages 108-111

  Papaioannou, George ^a,b,c   Coccetti, Fabio ^a,b,d   Plana, Robert ^a,b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ PAUL SABATIER   (France)

^c UNIVERSITY OF ATHENS   (Greece)

^d Novamems   (France)

Author keywords

Capacitive switches; Dielectric charging; Dielectrics; MEMS lifetime; Reliability

Indexed keywords

BIAS DEPENDENCE; CAPACITIVE SWITCH; DIELECTRIC CHARGING; EXPERIMENTAL DATA; EXPONENTIAL DISTRIBUTIONS; FIRST-PRINCIPLES; LIFETIME RELIABILITY; RF MEMS CAPACITIVE SWITCHES; RF-MEMS; STRETCHED EXPONENTIAL LAW;

DIELECTRIC MATERIALS; ELECTRIC SWITCHES; INTEGRATED CIRCUITS; RADIOFREQUENCY SPECTROSCOPY;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 77951040043     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2010.5422970     Document Type: Conference Paper

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