A high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure

IEEE Sensors Journal

Volumn 10, Issue 6, 2010, Pages 1066-1074

  Ding, Haitao ^a   Liu, Xuesong ^a   Lin, Longtao ^a   Chi, Xiaozhu ^a   Cui, Jian ^a   Kraft, Michael ^b   Yang, Zhenchuan ^a   Yan, Guizhen ^a  

^a PEKING UNIVERSITY   (China)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Atmospheric pressure; Closed loop; Double decoupled; Gyroscope

Indexed keywords

AC DRIVES; ACTIVE TEMPERATURE CONTROL; ANGULAR RATE; CLOSED LOOPS; CLOSED-LOOP; CROSS-COUPLINGS; DC BIAS; DECOUPLED GYROSCOPE; DEEP REACTIVE ION ETCHING; DOUBLE DECOUPLED; DRIVE MODE; DRIVE VOLTAGE; EXPERIMENTAL MEASUREMENTS; FABRICATION IMPERFECTIONS; FABRICATION PROCESS; HIGH RESOLUTION; INPUT SIGNAL; LARGE PROOF MASS; LONG-TERM MEASUREMENTS; MECHANICAL STRUCTURES; NON-LINEARITY; QUALITY FACTORS; SCALE FACTOR; SELF-OSCILLATIONS; SENSE MODE; SILICON ON GLASS; ZERO BIAS;

ATMOSPHERIC PRESSURE; ATMOSPHERICS; CAPACITANCE; FINITE ELEMENT METHOD; GLASS; GYROSCOPES; REACTIVE ION ETCHING;

GLASS BONDING;

EID: 77950821648     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2043669     Document Type: Conference Paper

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