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Volumn , Issue , 2008, Pages 674-677

A highly double-decoupled self-oscillation gyroscope operating at atmospheric pressure

Author keywords

[No Author keywords available]

Indexed keywords

AC DRIVES; BIAS STABILITY; DC BIAS; DRIVE MODE; DRIVE VOLTAGE; EXPERIMENTAL MEASUREMENTS; FABRICATION IMPERFECTIONS; HIGH ASPECT RATIO; NON-LINEARITY; QUALITY FACTORS; SCALE FACTOR; SELF-OSCILLATION; SENSE MODE; TEMPERATURE CONTROL METHODS;

EID: 66349087034     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716531     Document Type: Conference Paper
Times cited : (12)

References (9)
  • 2
    • 0003380730 scopus 로고    scopus 로고
    • A bulk-micromachined single crystal silicon gyroscope operating at atmospheric pressure
    • S. Kim, J. Lee, C. Kim, et al, "A bulk-micromachined single crystal silicon gyroscope operating at atmospheric pressure", Transducers'01, p. 476-479, 2001
    • (2001) Transducers'01 , pp. 476-479
    • Kim, S.1    Lee, J.2    Kim, C.3
  • 3
    • 0142060054 scopus 로고    scopus 로고
    • A novel bulk micromachined gyroscope with slots structure working at atmosphere
    • B. Xiong, L. Che and Y. Wang, "A novel bulk micromachined gyroscope with slots structure working at atmosphere", Sensors and Actuators A 107, p. 137-145, 2003
    • (2003) Sensors and Actuators A 107 , pp. 137-145
    • Xiong, B.1    Che, L.2    Wang, Y.3
  • 4
    • 24044523916 scopus 로고    scopus 로고
    • A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure
    • DOI 10.1007/s00542-004-0438-8
    • Y. Chen, J. Jiao, B. Xiong, L. Che, et al, "A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure", Microsystem Technologies 11, p. 111-116, 2005 (Pubitemid 41214179)
    • (2005) Microsystem Technologies , vol.11 , Issue.2-3 , pp. 111-116
    • Chen, Y.1    Jiao, J.2    Xiong, B.3    Che, L.4    Li, X.5    Wang, Y.6
  • 5
    • 33645759300 scopus 로고    scopus 로고
    • Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator
    • C. Acar and A. Shkel, "Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator", J. Microelectromech. Syst., vol.15, p. 380-387, 2006
    • (2006) J. Microelectromech. Syst. , vol.15 , pp. 380-387
    • Acar, C.1    Shkel, A.2
  • 7
    • 50249169956 scopus 로고    scopus 로고
    • A bulk micromachined zaxis single crystal silicon gyroscope for commercial applications
    • H. Ding, X. Liu, J. Cui, et al, "A bulk micromachined zaxis single crystal silicon gyroscope for Commercial Applications", IEEE NEMS'08, p. 1039-1042, 2008
    • (2008) IEEE NEMS'08 , pp. 1039-1042
    • Ding, H.1    Liu, X.2    Cui, J.3
  • 9
    • 43049085821 scopus 로고    scopus 로고
    • Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections
    • B. Lv, X. Liu, Z. Yang et al, "Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections", Microsystem Technologies 14, p. 711-718, 2008
    • (2008) Microsystem Technologies 14 , pp. 711-718
    • Lv, B.1    Liu, X.2    Yang, Z.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.