SCOPUS 정보 검색 플랫폼

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn , Issue , 2008, Pages 2432-2435

CMOS-MEMS gyroscope using integrated diode-rings as interface circuits

(3) Wang, Jia a Qian, Liang a Yan, Guizhen a

a PEKING UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

AS INTERFACES; BULK SILICONS; CMOS-MEMS; COMPENSATION CIRCUITS; INTEGRATED DIODES; INTEGRATED INTERFACES; INTEGRATION SYSTEMS; INTEGRATION TECHNOLOGIES; INTERFACE CIRCUITS; ISOLATION TRENCHES; STANDARD CMOS PROCESS;

DEMODULATION; DIODES; GYROSCOPES; INTEGRATED CIRCUITS; LOGIC CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS;

CMOS INTEGRATED CIRCUITS;

EID: 60649115896 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/ICSICT.2008.4735062 Document Type: Conference Paper

Times cited : (2)

References (5)

1
- 27544480928
- Post-CMOS Process for High-Aspect-Ratio Monolithically Integrated Single Crystal Silicon Microstructures
- Korea, June 5-9
- Yong Zhu, Guizhen Yan, Jie Fan, et al., "Post-CMOS Process for High-Aspect-Ratio Monolithically Integrated Single Crystal Silicon Microstructures", 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05),Korea, June 5-9, 2005.
- (2005) 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05)
- Zhu, Y.¹ Yan, G.² Fan, J.³

2
- 60649104496
- master thesis, CMU
- Sitarman V.Iyer Modeling and Simulation of Non-idealities in a Z-axis CMOS-MEMS Gyroscope, master thesis, CMU 2003
- (2003) Iyer Modeling and Simulation of Non-idealities in a Z-axis CMOS-MEMS Gyroscope
- Sitarman, V.¹

3
- 21644479006
- Investigation of Fabricating Ultra Deep and High Aspect Ratio Electrical Isolation Trench without Void
- Yong Zhu, Jie Fan, Chengwei Wang, et al., "Investigation of Fabricating Ultra Deep and High Aspect Ratio Electrical Isolation Trench without Void", The 7th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT2004),Beijing, China, October 18-21, 2004, ppl892-1895.
- The 7th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT2004),Beijing, China, October 18-21, 2004, ppl892-1895
- Zhu, Y.¹ Fan, J.² Wang, C.³

4
- 60649100280
- A Method To Remove The Residual Silicon Of The Deep Isolation Trench Used In Post-CMOS Process For Monolithically Integrated Silicon Microstructures
- Singapore, 25-28 June
- Jia Wang, Jie Fan, XueSong Liu, HaiTao Ding, Le Zhang, Guizhen Yan, "A Method To Remove The Residual Silicon Of The Deep Isolation Trench Used In Post-CMOS Process For Monolithically Integrated Silicon Microstructures" , Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT) Singapore, 25-28 June, 2006.
- (2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT)
- Wang, J.¹ Fan, J.² Liu, X.³ Ding, H.⁴ Zhang, L.⁵ Yan, G.⁶

5
- 50149101342
- Takahiro M4TSUO, Jinxing LIANG, Joanna PA WLAT and Toshitsugu UEDA, Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor, IEEE SENSORS 2006, EXCO, Daegu, Korea / October 22-25, 2006
- Takahiro M4TSUO, Jinxing LIANG, Joanna PA WLAT and Toshitsugu UEDA, Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor, IEEE SENSORS 2006, EXCO, Daegu, Korea / October 22-25, 2006

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.