A bulk micromachined z-axis single crystal silicon gyroscope for commercial applications

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 1039-1042

  Ding, Haitao ^a,b   Liu, Xuesong ^a,b   Cui, Jian ^a,b   Chi, Xiaozhu ^a,b   Guo, Zhongyang ^a,b   Yang, Zhenchuan ^a,b   Yan, Guizhen ^a,b  

^a PEKING UNIVERSITY   (China)

^b Institute of MicroandNano Science and Technology

Author keywords

Bulk micromachine; Deep reactive ion etching; Gyroscope; Silicon on glass

Indexed keywords

ACOUSTIC INTENSITY; ASPECT RATIO; FINITE ELEMENT METHOD; GALLIUM ALLOYS; GYROSCOPES; MATERIALS SCIENCE; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NONMETALS; OPTICAL DESIGN; POWDERS; SIGNAL TO NOISE RATIO; SILICON; SINGLE CRYSTALS;

AIR DAMPING; ANGULAR RATES; BULK MICROMACHINE; BULK-MICROMACHINED; CALCULATED VALUES; COMMERCIAL APPLICATIONS; DECOUPLED STRUCTURES; DEEP REACTIVE ION ETCHING; DRIVING MODES; FINITE ELEMENT METHOD SIMULATION; GYROSCOPE; INTERNATIONAL CONFERENCES; LARGE PROOF MASS; MECHANICAL COUPLING; MOLECULAR SYSTEMS; ORTHOGONAL DIRECTIONS; PROOF MASS; QUALITY FACTORS; RESONANT FREQUENCIES; SCALE FACTOR; SILICON ON GLASS; SINGLE-CRYSTAL-SILICON; TEST RESULTS;

SILICON WAFERS;

EID: 50249169956     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484497     Document Type: Conference Paper

References (9)

1. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE, Vol. 86, 1998, pp. 1640-1659.
2. S. S. Baek, Y. S. Oh, B. J. Ha, et al, "A symmetrical z-axis gyroscope with a high aspect ratio using simple and new process," Proc. IEEE MEMS'99, 1999, pp. 612-617.
3. Z. H. Li, Z. C. Yang, Z. X. Xiao, et al, "A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching," Proc. Transducers'99, 1999, pp. 1594-1597.
4. W. Geiger, W. U. Butt, A. Gaiber, et al. "Decoupled microgyros and the design principle DAVED," Proc. IEEE MEMS'01, 2001, pp. 170-173
5. X. S. Liu, Z. C. Yang, X. Z. Chi, et al, "An x-axis micromachined gyroscope with doubly decoupled oscillation modes," Porc. IEEE MEMS'08, 2008, in press.
6. M. S. Kranz and G. Fedder, "Micromechanical vibratory rate gyroscopes fabricated in conventional CMOS," in SGT'97, 1997, pp. 3.0-3.8.
7. S. E. Alper and T. Akin, "A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate," JMEMS, Vol. 14, No. 4, 2005, pp. 707-717.
8. S. Kim, J. Lee, C. Kim, and Y. Kim, "A bulk-micromachined single crystal silicon gyroscope operating at atmospheric pressure", Proc. Transducer'01, 2001, pp. 476-479.
9. M. H. Bao, Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes, Amsterdam: Elsevier B. V., 2000.