Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections

Microsystem Technologies

Volumn 14, Issue 6, 2008, Pages 711-718

  Lv, Bo ^a   Liu, Xuesong ^a   Yang, Zhenchuan ^a   Yan, Guizhen ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; DEFECTS; FINITE ELEMENT METHOD; HARMONIC ANALYSIS; MICROFABRICATION; MICROMACHINING; MODAL ANALYSIS;

ASYMMETRIC MOTION; DECOUPLED STRUCTURE; SENSING CAPACITORS;

GYROSCOPES;

EID: 43049085821     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0495-x     Document Type: Article

References (10)

1. Chiou JA (2006) Process window of micromachined gyroscopes subjected to vibrational frequencies. Sens Actuators A Phys 125:519-525
2. Ha SK, Jeong HM, Kim JO (2006) Robust design of a decoupled vibratory microgyroscope considering over-etching as a fabrication tolerance factor. JSME Int J Ser A Solid Mech Mat Eng 49:273-281
3. Han JS, Kwak BM (2001) Robust optimal design of a vibratory microgyroscope considering fabrication errors. J Micromech Microeng 11:662-671
4. Iyer S (2003) Modeling and simulation of non-idealities in a z-axis CMOS-MEMS gyroscope. Ph.D dissertation. EECS, Carnegie Mellon University
5. Iyer S, Mukherjee T (2002) Simulation of manufacturing variations in a z-axis CMOS-MEMS gyroscope. In: International conference on modeling and simulation of microsystems, pp 186-189
6. Liu XS, Wang CW, Zhu Y, Yan GZ (2004) Vertical profiles and CD loss control in deep RIE technology. In: International conference on solid-state and integrated circuits technology proceedings, pp 1848-1851
7. Liu XS, Yang ZC, Yan GZ, Fan J, Ding HT, Liu Y (2006) Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors. In: 2nd IEEE international conference on nano/micro engineered and molecular systems, pp 762-765
8. Liu XS, Lv B, Yang ZC, Ding HT, Yan GZ (2007) Simulation and test of a doubly decoupled lateral axis gyroscope. In: International conference on integration and commercialization of micro and nanosystems, pp 501-504
9. Shkel A, Howe RT, Horowitz R (1999) Modeling and simulation of micromachined gyroscopes in the presence of imperfections. In: International conference on modeling and simulation of microsystems, pp 605-608
10. Xiao ZY, Yang ZC, Zhang HX, Hao YL (2004) Nodal model simulation of an accelerometer. Beijing Daxue Xuebao 40:432-436