A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 111-116

  Chen, Y ^a   Jiao, J ^a   Xiong, B ^a   Che, L ^a   Li, X ^a   Wang, Y ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Bar structure; Micromachined gyroscope; Silicon micromachining; Slide film damping

Indexed keywords

ATMOSPHERIC PRESSURE; CAPACITANCE; DAMPING; ELECTRODES; GLASS; MICROMACHINING; SENSORS; SILICON; TUNING; VACUUM;

BAR STRUCTURE; MICROMACHINED GYROSCOPES; SILICON MICROMACHINING; SLIDE-FILM DAMPING;

GYROSCOPES;

EID: 24044523916     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0438-8     Document Type: Article

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