Structural and optical properties of γ-alumina thin films prepared by pulsed laser deposition

Thin Solid Films

Volumn 518, Issue 14, 2010, Pages 3898-3902

  Balakrishnan, G ^a   Kuppusami, P ^b   Sundari, S Tripura ^b   Thirumurugesan, R ^b   Ganesan, V ^c   Mohandas, E ^b   Sastikumar, D ^a  

^a NATIONAL INSTITUTE OF TECHNOLOGY   (India)

^b INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

^c UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

Author keywords

Alumina; Ellipsometry; Pulsed laser deposition; Thin films; X ray diffraction

Indexed keywords

ALUMINA THIN FILMS; ANGLES OF INCIDENCE; CONTACT MODES; CUBIC STRUCTURE; ENERGY RANGES; OXYGEN PARTIAL PRESSURE; POLYCRYSTALLINE; ROOT MEAN SQUARE; SILICON SUBSTRATES; STRUCTURAL AND OPTICAL PROPERTIES;

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELLIPSOMETRY; LIGHT REFRACTION; OPTICAL FILMS; ORGANIC POLYMERS; OXYGEN; PARTIAL PRESSURE; POSITIVE IONS; PULSED LASER DEPOSITION; PULSED LASERS; REFRACTIVE INDEX; REFRACTOMETERS; SINTERED ALUMINA; SINTERING; SURFACE ROUGHNESS; THIN FILMS; TOPOGRAPHY; X RAY DIFFRACTION;

FILM PREPARATION;

EID: 77950532936     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.12.001     Document Type: Article

References (36)

1. Wang J., Yu Y.H., Lee S.C., and Chung Y.W. Surf. Coat. Technol. 146 (2001) 189
2. Haanappel V.A.C., Van Corbach H.D., Fransen T., and Gellings P.J. Surf. Coat. Technol. 72 (1995) 13
3. Yan D., He J., Li X., Jianxin L., and Huili Ding Z. Surf. Coat. Technol. 141 (2001) 1
4. Pillonnet A., Garapon C., Champeaux C., Bovier C., Jaffrezic H., and Mugnier J. J. Lumin. 87 (2000) 1087
5. Chang Y.S., and Roy N. Thin Solid Films 193/194 (1990) 959
6. Nahar R.K., and Khanna V.K. Int. J. Electron. 52 (1982) 557
7. Shamala K.S., Murthy L.C.S., Radhakrishna M.C., and Narasimha Rao K. Sens. Actuators A 135 (2007) 552
8. Katiyar P., Jin C., and Narayan R.J. Acta Mater. 53 (2005) 2617
9. Khanna A., and Bhat D.G. Surf. Coat. Technol. 201 (2006) 168
10. Levin L., Bendersky L.A., Brandon D.G., and Ruhle M. Acta Mater. 45 (1997) 3659
11. Murayama T., and Nakai T. Appl. Phys. Lett. 58 (1991) 2079
12. Pradhan S.K., Reucroft P.J., and Ko Y. Surf. Coat. Technol. 176 (2004) 382
13. Kohara T., Tamagaki H., Ikari Y., and Fujii H. Surf. Coat. Technol. 185 (2004) 166
14. Chen Y., Ai X., Huang C., and Wang B. Mater. Sci. Eng A 288 (2000) 19
15. Ghodsi F.E., Mafakheri M., and Novinrooz A. Surf. Rev. Lett. 2 5 (2005) 793
16. Aguilar-Frutis M., Garcia M., Falcony C., Plesch G., and Jimenez-Sandoval S. Thin Solid Films 389 (2001) 200
17. Shamala K.S., Murthy L.C.S., and Narasimha Rao K. Mater. Sci. Eng. B 106 (2004) 269
18. Maniv S., and Westwod W.D. J. Vac. Sci. Technol. 17 (1980) 743
19. Chen G.-L., and Sivertsen J.N. Mater. Lett. 2 (1984) 196
20. Cloud A.N., Canovic S., Abu-Safe H.H., Gordon M.H., and Halvarsson M. Surf. Coat. Technol. 203 (2008) 808
21. Zywitzki O., Goedicke K., and Morgner H. Surf. Coat. Technol. 151/152 (2002) 14
22. Krishnan R., Dash S., Kesavamoorthy R., Babu Rao C., Tyagi A.K., and Raj B. Surf. Coat. Technol. 200 (2006) 2791
23. Krishnan R., Dash S., Sole R.K., Tyagi A.K., and Raj B. Surf. Eng. 18 (2002) 208
24. Al-Robaee M.S., Subbanna G.N., Narasimha Rao K., and Mohan S. Vacuum 45 1 (1994) 97
25. Zhao Z.W., Tay B.K., and Sheeja D. Surf. Coat. Technol. 167 (2003) 234
26. Zhao Z.W., Tay B.K., Lau S.P., and Xiao C.Y. J. Vac. Sci. Technol. A 21 4 (2003) 906
27. Gottmann J., and Kreutz E.W. Surf. Coat. Technol. 116/119 (1999) 1189
28. Gottmann J., Husmann A., Klotzbucher T., and Kreutz E.W. Surf. Coat. Technol. 100/101 (1998) 415
29. Cibert C., Hidalgo H., Champeaux C., Tristant P., Tixier C., Desmaison J., and Catherinot A. Thin Solid Films 516 (2008) 1290
30. In: Chrisey D.B., and Hubler G.B. (Eds). Pulsed Laser Deposition of Thin Films (1994), Wiley, New York
31. Nakamura T., Yamanaka Y., Morimoto A., and Shimizu T. Jpn. J. Appl. Phys. 34 (1995) 5150
32. Pillonnet A., Garapon C., Champeaux C., Bovier C., Bregnier R., Jaffrezic H., and Mugnier J. Appl. Phys. A. 69 (1999) S735
33. Palik E.D. Hand book of optical constants of solids II (1998), Academic press, New York
34. Erman M., Theeten J.B., Chanban P., Kelso S.M., and Aspres D.E. J. Appl. Phys. 56 (1984) 2664
35. Smith D.L. Thin Films Deposition, Principles and Practice (1995), McGraw -Hill, New York
36. Shen Y., Shao S., Yu H., Fan Z., He Z., and Shao J. Appl. Surf. Sci. 254 (2007) 552