Deposition of α-Al2O3 hard coatings by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 185, Issue 2-3, 2004, Pages 166-171

  Kohara, T ^a   Tamagaki, H ^a   Ikari, Y ^a   Fujii, H ^a  

^a KOBE STEEL LTD   (Japan)

Author keywords

Aluminum oxide (Al2O3); Coating; Reactive magnetron sputtering

Indexed keywords

CORRELATION METHODS; DEPOSITION; HARDNESS; MAGNETRON SPUTTERING; OXIDATION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DEPOSITION RATE; FILM STRUCTURE;

COATING TECHNIQUES;

ALUMINUM OXIDE; COATING; SPUTTERING;

EID: 3042594884     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.11.017     Document Type: Article

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