11'000 electrode-, 126 channel-CMOS microelectrode array for electrogenic cells

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 541-544

  Frey, U ^a   Heer, F ^a   Pedron, R ^a   Greve, F ^a   Hafizovic, S ^a   Kirstein, K U ^a   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRODES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALLIZING; METALS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SURFACE DEFECTS;

BI-DIRECTIONAL COMMUNICATIONS; CARDIOMYOCYTES; HIGH-SPATIAL RESOLUTION; INTERNATIONAL CONFERENCES; METAL ELECTRODES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-ELECTRODE ARRAYS; ON CHIPS;

PHOTORESISTS;

EID: 52149089869     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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