Fabrication of a hollow needle structure by dicing, wet etching and metal deposition

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2230-2239

  Shikida, Mitsuhiro ^a   Hasada, Takehiko ^a   Sato, Kazuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; MEDICAL PROBLEMS; MICROELECTROMECHANICAL DEVICES; NEEDLES; PHOTOLITHOGRAPHY; PLATING;

MECHANICAL DICING; METAL DEPOSITION; MICRONEEDLES; WET ETCHING;

COMPOSITE MICROMECHANICS;

EID: 33748783815     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/041     Document Type: Article

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