A novel fabrication method of a microneedle array using inclined deep x-ray exposure

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 903-911

  Moon, Sang Jun ^a   Lee, Seung S ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BLOOD; COMPOSITE MICROMECHANICS; INDUCTIVELY COUPLED PLASMA; MICROSTRUCTURE; NEEDLES; PLASMA ETCHING; POLYMETHYL METHACRYLATES; SEMICONDUCTING SILICON; SKIN; THREE DIMENSIONAL; X RAY ANALYSIS;

BLOOD EXTRACTION; MICRONEEDLES; SKIN SURFACES; WET ETCHING TECHNIQUES;

MICROMACHINING;

EID: 24144465860     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/002     Document Type: Article

References (13)

1. Champin R H, Burton J L and Ebling F J G (ed) 1992 Textbook of Dermatology (London: Blackwell Scientific)
2. Lin L and Pisano AP 1999 Silicon-processed microneedles J. Microelectromech. Syst. 8 78-84
3. Gardeniers J G E, Berenschot J W, de Boer M J, Yeshurun Y, Hefetzm M, van't Oever R and van den Berg A 2002 Silicon micromachined hollow microneedles for transdermal liquid transfer 15th IEEE Int. Conf. on Micro Electro Mechanical Systems (Las Vegas, NV, USA, 20-24 January) pp 141-4
4. Henry S, AcAllister D V, Allen M G and Prausnitz M R 1998 Microfabricated microneedles: a novel approach to transdermal drug delivery J. Pharm. Sci. 87 922-5
5. Griss P and Stemme G 2002 Novel, side opened out-of-plane microneedles for microfluidic transdermal interfacing 15th IEEE Int. Conf. on Micro Electro Mechanical Systems (Las Vegas, NV, USA, 20-24 January) pp 467-70
6. Trautmann A, Ruther P and Paul O 2003 Microneedle arrays fabricated using suspended etch mask technology combined with fluidic through wafer vias IEEE: The 16th Annual Int. Conf. on Micro Electro Mechanical Systems (Kyoto, Japan, 19-23 January) pp 682-5
7. Stoeber B and Liepmann D 2000 Fluid injection through out-of-plane microneedles 1st Annual Int. IEEE-EMBS Special Topic Conf. on Microtechnologies in Medicine & Biology (Lyon, France, 12-14 October) pp 224-228
8. Zahn J D, Talbot N H, Liepmann D and Pisano A P 2000 Microfabricated polysilicon microneedles for minimally invasive biomedical devices Biomed. Microdevices 2 295-303
9. Shikida M, Odagaki M, Todoroki N, Ando M, Ishihara Y, Ando T and Sato K 2003 Non-photolithographic pattern transfer for fabricating arrayed 3-D microstructures by chemical anisotropic etching IEEE: The 16th Annual Int. Conf. on Micro Electro Mechanical Systems (Kyoto, Japan, 19-23 January) pp 562-5
10. Trichur R, Kim S, Zhu X, Suk J W, Hong C-C, Choi J-W and Ahn C H 2002 Development of plastic microneedles for transdermal interfacing using injection molding techniques Micro Total Analysis System 2002 (Nara, Japan, 3-7 November) vol 1 pp 395-7
11. Chandrasekaran S and Frazier A B 2003 Characterization of surface micromachined hollow metallic microneedles IEEE: The 16th Annual Int. Conf. on Micro Electro Mechanical Systems (Kyoto, Japan, 19-23 January) pp 363-6
12. Park J-H, Davis S, Yoon Y-K, Prausnitz M R and Allen M G 2003 Micromachined biodegradable microstructures IEEE: The 16th Annual Int.l Conf. on Micro Electro Mechanical Systems (Kyoto, Japan, 19-23 January) pp 371-4
13. Oh D-Y and Lee S S 2001 A tetrahedral three-facet micro mirror with the inclined deep x-ray process Sensors Actuators A 93 157-61