Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching

Journal of Micromechanics and Microengineering

Volumn 16, Issue 8, 2006, Pages 1740-1747

  Shikida, Mitsuhiro ^a   Hasada, Takehiko ^a   Sato, Kazuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; CHANNEL FLOW; ETCHING; FABRICATION; NEEDLES;

MECHANICAL DICING; MICRO NEEDLE ARRAYS; NEEDLE ARRAYS; WET ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 33746270171     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/8/039     Document Type: Article

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