-
1
-
-
13844309960
-
-
1567-1739,. 10.1016/j.ca2004.02.012
-
G. W. Kang, K. M. Park, J. H. Song, C. H. Lee, and D. H. Hwang, Curr. Appl. Phys. 1567-1739 5, 297 (2005). 10.1016/j.cap.2004.02.012
-
(2005)
Curr. Appl. Phys.
, vol.5
, pp. 297
-
-
Kang, G.W.1
Park, K.M.2
Song, J.H.3
Lee, C.H.4
Hwang, D.H.5
-
2
-
-
68249110641
-
-
0003-6951,. 10.1063/1.3190196
-
D. I. Kim, Y. K. Kim, S. C. Park, J. H. Huh, J. H. Na, G. T. Kim, and J. S. Ha, Appl. Phys. Lett. 0003-6951 95, 043107 (2009). 10.1063/1.3190196
-
(2009)
Appl. Phys. Lett.
, vol.95
, pp. 043107
-
-
Kim, D.I.1
Kim, Y.K.2
Park, S.C.3
Huh, J.H.4
Na, J.H.5
Kim, G.T.6
Ha, J.S.7
-
3
-
-
0035872897
-
High-κ gate dielectrics: Current status and materials properties considerations
-
DOI 10.1063/1.1361065
-
G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 0021-8979 89, 5243 (2001). 10.1063/1.1361065 (Pubitemid 33598307)
-
(2001)
Journal of Applied Physics
, vol.89
, Issue.10
, pp. 5243-5275
-
-
Wilk, G.D.1
Wallace, R.M.2
Anthony, J.M.3
-
4
-
-
33947187526
-
2 gate insulator formed by atomic layer deposition for thin-film-transistors
-
DOI 10.1016/j.tsf.2006.10.083, PII S0040609006011990
-
S. W. Jeong, H. J. Lee, K. S. Kim, M. T. You, Y. Roh, T. Noguchi, W. Xianyu, and J. Jung, Thin Solid Films 0040-6090 515, 5109 (2007). 10.1016/j.tsf.2006.10.083 (Pubitemid 46399838)
-
(2007)
Thin Solid Films
, vol.515
, Issue.12
, pp. 5109-5112
-
-
Jeong, S.-W.1
Lee, H.J.2
Kim, K.S.3
You, M.T.4
Roh, Y.5
Noguchi, T.6
Xianyu, W.7
Jung, J.8
-
5
-
-
10844282042
-
-
0026-2692,. 10.1016/j.mejo.2004.10.010
-
Y. S. Kim, K. Miyauchi, S. I. Ohmi, K. Tsutsui, and H. Iwai, Microelectron. J. 0026-2692 36, 41 (2005). 10.1016/j.mejo.2004.10.010
-
(2005)
Microelectron. J.
, vol.36
, pp. 41
-
-
Kim, Y.S.1
Miyauchi, K.2
Ohmi, S.I.3
Tsutsui, K.4
Iwai, H.5
-
6
-
-
33745136120
-
-
0167-9317,. 10.1016/j.mee.2006.01.043
-
E. Atanassova, D. Spassov, and A. Paskaleva, Microelectron. Eng. 0167-9317 83, 1918 (2006). 10.1016/j.mee.2006.01.043
-
(2006)
Microelectron. Eng.
, vol.83
, pp. 1918
-
-
Atanassova, E.1
Spassov, D.2
Paskaleva, A.3
-
7
-
-
54749145012
-
-
0022-3727,. 10.1088/0022-3727/41/17/175414
-
Y. Zhou, N. Kojima, and K. Sasaki, J. Phys. D: Appl. Phys. 0022-3727 41, 175414 (2008). 10.1088/0022-3727/41/17/175414
-
(2008)
J. Phys. D: Appl. Phys.
, vol.41
, pp. 175414
-
-
Zhou, Y.1
Kojima, N.2
Sasaki, K.3
-
8
-
-
0344193517
-
-
0040-6090,. 10.1016/S0040-6090(02)01105-7
-
M. Kadoshima, M. Hiratani, Y. Shimamoto, K. Torii, H. Miki, S. Kimura, and T. Nabatame, Thin Solid Films 0040-6090 424, 224 (2003). 10.1016/S0040-6090(02)01105-7
-
(2003)
Thin Solid Films
, vol.424
, pp. 224
-
-
Kadoshima, M.1
Hiratani, M.2
Shimamoto, Y.3
Torii, K.4
Miki, H.5
Kimura, S.6
Nabatame, T.7
-
9
-
-
58049088384
-
-
0013-4651,. 10.1149/1.3033500
-
H. Kwon, H. H. Park, B. H. Kim, and J. S. Ha, J. Electrochem. Soc. 0013-4651 156, G13 (2009). 10.1149/1.3033500
-
(2009)
J. Electrochem. Soc.
, vol.156
, pp. 13
-
-
Kwon, H.1
Park, H.H.2
Kim, B.H.3
Ha, J.S.4
-
10
-
-
59349087551
-
-
0003-6951,. 10.1063/1.3075954
-
Y. Zhao, K. Kita, K. Kyuno, and A. Toriumi, Appl. Phys. Lett. 0003-6951 94, 042901 (2009). 10.1063/1.3075954
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 042901
-
-
Zhao, Y.1
Kita, K.2
Kyuno, K.3
Toriumi, A.4
-
11
-
-
77949764532
-
-
IEDM Tech. Dig..
-
W. Kim, J. Joo, Y. Jeong, S. Won, S. Park, S. Lee, C. Yoo, S. Kim, and J. Moon, IEDM Tech. Dig. 1 (2001).
-
(2001)
, vol.1
-
-
Kim, W.1
Joo, J.2
Jeong, Y.3
Won, S.4
Park, S.5
Lee, S.6
Yoo, C.7
Kim, S.8
Moon, J.9
-
12
-
-
79956019609
-
-
0003-6951,. 10.1063/1.1499223
-
M. H. Cho, Y. S. Rho, C. N. Whang, K. Jeong, H. J. Choi, S. W. Nam, D. H. Ko, J. H. Lee, N. I. Lee, and K. Fujihara, Appl. Phys. Lett. 0003-6951 81, 1071 (2002). 10.1063/1.1499223
-
(2002)
Appl. Phys. Lett.
, vol.81
, pp. 1071
-
-
Cho, M.H.1
Rho, Y.S.2
Whang, C.N.3
Jeong, K.4
Choi, H.J.5
Nam, S.W.6
Ko, D.H.7
Lee, J.H.8
Lee, N.I.9
Fujihara, K.10
-
13
-
-
33947113495
-
z films grown on TiN substrate by atomic layer deposition
-
DOI 10.1063/1.2709951
-
S. Y. Kim, H. Kwon, S. J. Jo, and J. S. Ha, Appl. Phys. Lett. 0003-6951 90, 103104 (2007). 10.1063/1.2709951 (Pubitemid 46398461)
-
(2007)
Applied Physics Letters
, vol.90
, Issue.10
, pp. 103104
-
-
Kim, S.Y.1
Kwon, H.2
Jo, S.J.3
Ha, J.S.4
Park, W.T.5
Kang, D.K.6
Kim, B.-H.7
-
14
-
-
47049096034
-
-
0935-9648,. 10.1002/adma.200701085
-
S. K. Kim, G. J. Choi, S. Y. Lee, M. H. Seo, S. W. Lee, J. H. Han, H. S. Ahn, S. W. Han, and C. S. Hwang, Adv. Mater. (Weinheim, Ger.) 0935-9648 20, 1429 (2008). 10.1002/adma.200701085
-
(2008)
Adv. Mater. (Weinheim, Ger.)
, vol.20
, pp. 1429
-
-
Kim, S.K.1
Choi, G.J.2
Lee, S.Y.3
Seo, M.H.4
Lee, S.W.5
Han, J.H.6
Ahn, H.S.7
Han, S.W.8
Hwang, C.S.9
-
15
-
-
33846456971
-
2 core/shell nanowires: From synthesis to mechanical, optical, electrical, and photoconductive properties
-
DOI 10.1002/adma.200601830
-
Y. L. Chueh, C. H. Hsieh, M. T. Chang, L. J. Chou, C. S. Lao, J. H. Song, J. Y. Gan, and Z. L. Wang, Adv. Mater. (Weinheim, Ger.) 0935-9648 19, 143 (2007). 10.1002/adma.200601830 (Pubitemid 46144827)
-
(2007)
Advanced Materials
, vol.19
, Issue.1
, pp. 143-149
-
-
Chueh, Y.-L.1
Hsieh, C.-H.2
Chang, M.-T.3
Chou, L.-J.4
Lao, C.S.5
Song, J.H.6
Gan, J.-Y.7
Wang, Z.L.8
-
16
-
-
41749086201
-
-
0741-3106,. 10.1109/LED.2008.917817
-
Y. Xuan, Y. Wu, and P. Ye, IEEE Electron Device Lett. 0741-3106 29, 294 (2008). 10.1109/LED.2008.917817
-
(2008)
IEEE Electron Device Lett.
, vol.29
, pp. 294
-
-
Xuan, Y.1
Wu, Y.2
Ye, P.3
-
17
-
-
0001407345
-
-
0003-6951,. 10.1063/1.126197
-
G. T. Kim, J. Muster, V. Krstic, J. G. Park, Y. W. Park, S. Roth, and M. Burghard, Appl. Phys. Lett. 0003-6951 76, 1875 (2000). 10.1063/1.126197
-
(2000)
Appl. Phys. Lett.
, vol.76
, pp. 1875
-
-
Kim, G.T.1
Muster, J.2
Krstic, V.3
Park, J.G.4
Park, Y.W.5
Roth, S.6
Burghard, M.7
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