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Volumn 50, Issue 9, 2010, Pages 878-885

Spatial distribution of plasma parameters in DC-energized hollow cathode plasma jet

Author keywords

Hollow cathode; Langmuir probe; Plasma jet

Indexed keywords

ARGON; CATHODES; DEPOSITION; DISSOCIATION; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; ELECTRON SOURCES; ELECTRONS; NOZZLES; OXYGEN; PLASMA DEVICES; PLASMA STABILITY; SUBSTRATES;

EID: 77949539418     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201010149     Document Type: Article
Times cited : (6)

References (23)
  • 18
    • 85153288523 scopus 로고    scopus 로고
    • in: Low Temperature Plasmas, edited by R. Hippler, H. Kersten, M. Schmidt, and K. H. Schoenbach (Wiley-VCH, Berlin, 2007), chap. 7.
    • S. Pfau and M. Tichỳ, in: Low Temperature Plasmas, edited by R. Hippler, H. Kersten, M. Schmidt, and K. H. Schoenbach (Wiley-VCH, Berlin, 2007), chap. 7.
    • Pfau, S.1    Tichỳ, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.