RF hollow cathode plasma jet depopsition of BaxSr 1-xTi03 films

Materials Research Society Symposium Proceedings

Volumn 869, Issue , 2005, Pages 133-138

  Ianno, N J ^a   Soukup, R J ^a   Hubicka Z ^b   Olejnicek J ^b   Sichova H ^b  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; COMPOSITION; DEPOSITION; GRAIN SIZE AND SHAPE; NOZZLES; PLASMA JETS;

FILM COMPOSITION; NOZZLE COMPOSITION; PLASMA JET DEPOSITION;

BARIUM COMPOUNDS;

EID: 30544452945     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-869-d2.4     Document Type: Conference Paper

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14. 3 films" presented at the XIII International Materials Research Congress 2004, August 2004 Cancun Mexico.