Hollow cathode and hybrid plasma processing

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 688-692

  Baránková, Hana ^a,b   Bardos, Ladislav ^a,b  

^a UPPSALA UNIVERSITY   (Sweden)

^b BB Plasma Design AB   (Sweden)

Author keywords

Air plasma; Cold atmospheric plasma; Fused hollow cathode; Hollow cathode; Hollow cathode processing; Hybrid plasma; Linear hollow cathode; Pulsed power

Indexed keywords

ATMOSPHERICS; COATINGS; MICROWAVES; PLASMAS; SURFACE STRUCTURE;

AIR PLASMA; COLD ATMOSPHERIC PLASMA; FUSED HOLLOW CATHODE; HOLLOW CATHODE PROCESSING; HOLLOW CATHODES; HYBRID PLASMA; LINEAR HOLLOW CATHODE; PULSED POWER;

CATHODES;

EID: 33646566004     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.047     Document Type: Article

References (22)

1. Bardos L, et al., Czech patent PV 4407-85.
2. Baránková H. In: Proceedings of the joint international meeting of the electrochemical society and the international society of electrochemistry, Paris, vol. 97-30, 1997. The Electrochem. Soc., Inc.; 1998. p. 348.
3. Baránková H., and Bardos L. Surf Coat Technol 704 (1999) 120-121
4. Bardos L., Dusek V., and Vanecek M. J Non-Cryst Solids 281 (1987) 97/98
5. Bardos L., et al., Diamond Relat Mater 517 (1993) 2
6. Baránková H., Bardos L., and Berg S. J Electrochem Soc 883 (1995) 142
7. Baránková H., Bardos L., and Gustavsson L.-E. J Vac Sci Technol A 959 (2005) 23
8. Bardos L., Baránková H., and Berg S. Appl Phys Lett 577 (1997) 70
9. Baránková H, Bardos L. Swedish patent 9704260-0 (1997), PCT/SE98/01983, US patent 6,351,075.
10. Baránková H, Bardos L. In: 42nd annual technical conference proceedings, Albuquerque, NM: society of vacuum coaters, 1999. p.136.
11. Baránková H., and Bardos L. Surf Coat Technol 486 (2001) 146-147
12. Baránková H., Bardos L., and Berg S. J Vac Sci Technol A 3033 (1996) 14
13. Simon C., Heraux S., Michel H., Bougdira J., and Fabry M. J Phys D: Appl Phys 672 (1991) 24
14. Bardos L, Baránková H. Swedish patent 9904295-4, 1999, PCT/SE00/02315.
15. Bardos L., Baránková H., Gustavsson L- E., and Teer D.G. Surf Coat Technol 651 (2004) 177-178
16. Baránková H., and Bardos L. Appl Phys Lett 285 (2000) 76
17. Baránková H, Bardos L. Swedish patents 9901527/3 and 0000167/7 1999.
18. Baránková H, Bardos L. U.S. patent no. 6,524,538 1999.
19. Baránková H., and Bardos L. Surf Coat Technol 649 (2003) 163-164
20. Baránková H., and Bardos L. Galvanotechnik 2244 (2004) 95
21. Baránková H., and Bardos L. Surf Coat Technol 688 (2004) 177-178
22. Bardos L., and Baránková H. J Vac Sci Technol A 933 (2005) 23