Room-temperature capillary-imprint lithography for making micro-/nanostructures in large areas

Journal of Vacuum Science and Technology B

Volumn 28, Issue 1, 2010, Pages 138-142

  Ye, Xiangdong ^a   Ding, Yucheng ^a   Duan, Yugang ^a   Liu, Hongzhong ^a   Lu, Bingheng ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MOLDS; ROOM TEMPERATURE; VISCOSITY;

CAPILLARY FORCE; CAPILLARY FORCE LITHOGRAPHY; CONFORMAL CONTACTS; DRIVING CONDITIONS; FEATURE PATTERN; IMPRINT LITHOGRAPHY; MICRONANOSTRUCTURE; MOLD STRUCTURE; PRESSURE CONTACTS; SIMPLE++;

SILICONES;

EID: 77949401994     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3290753     Document Type: Conference Paper

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