Cross-sectional TEM analysis of laser-induced ripple structures on the 4H-SiC single-crystal surface

Applied Physics A: Materials Science and Processing

Volumn 92, Issue 3, 2008, Pages 665-668

  Okada, T ^a   Kawahara, H ^a   Ishida, Y ^a   Kumai, R ^a   Tomita, T ^a   Matsuo, S ^a   Hashimoto, S ^a   Kawamoto, M ^b   Makita, Y ^c   Yamaguchi, M ^d  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b ASAHI GLASS CO LTD   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^d Japan Society for the Promotion of Machine Industry   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LASERS; LAW ENFORCEMENT; LITHOGRAPHY; POWDERS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SILICON CARBIDE;

AMORPHOUS LAYERS; CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY (X TEM); CROSS-SECTIONAL TEM (XTEM); CRYSTAL SURFACES; FEMTOSECOND (FS) LASERS; HIGH-RESOLUTION TEM (HRTEM); LASER-INDUCED; RIPPLE STRUCTURES; SURFACE DEFORMATIONS;

CRYSTAL STRUCTURE;

EID: 48349128085     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4611-2     Document Type: Conference Paper

References (20)

1. M. Birnbaum, J. Appl. Phys. 36, 3688 (1965)
2. J.E. Sipe, J.F. Young, J.S. Preston, H.M. Driel, Phys. Rev. B 27, 1141 (1983)
3. J. F Young, J.S. Preston, H.M. Driel, J.E. Sipe, Phys. Rev. B 27, 1155 (1983)
4. J.F. Young, J.E. Sipe, H.M. Driel, Phys. Rev. B 30, 2001 (1984)
5. J. Bonse, H. Sturm, D. Schmidt, W. Kautek, Appl. Phys. A 71, 657 (2000)
6. F. Costache, M. Henyk, J. Reif, Appl. Surf. Sci. 186, 352 (2002)
7. N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 76, 983 (2003)
8. A. Borowiec, H.K. Haugen, Appl. Phys. Lett. 82, 4462 (2003)
9. Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, K. Wang, Appl. Phys. Lett. 82, 1703 (2003)
10. J. Bonse, M. Munz, H. Sturm, J. Appl. Phys. 97, 013538 (2005)
11. T.Q. Jia, H.X. Chen, M. Huang, F.L. Zhao, J.R. Qiu, R.X. Li, Z.Z. Xu, X.K. He, J. Zhang, H. Kuroda, Phys. Rev. B 72, 125429 (2005)
12. W. Kautek, P. Rudolph, G. Daminelli, J. Krüger, Appl. Phys. A 81, 65 (2005)
13. Y. Shimotsuma, P.G. Kazansky, J. Qiu, K. Hirano, Phys. Rev. Lett. 91, 247405 (2003)
14. V.R. Bhardwaj, E. Simova, P.P. Rajeev, C. Hnatovsky, R.S. Taylor, D.M. Rayner, P.B. Corkum, Phys. Rev. Lett. 96, 057404 (2006)
15. T. Tomita, K. Kinoshita, S. Matsuo, S. Hashimoto, Jpn. J. Appl. Phys. 45, L444 (2006)
16. T. Tomita, K. Kinoshita, S. Matsuo, S. Hashimoto, Appl. Phys. Lett. 90, 153115 (2007)
17. M. Yamaguchi, S. Ueno, K. Kinoshita, T. Murai, T. Tomita, S. Matsuo, S. Hashimoto, in Proc. 4th Int. Cong. Laser Advanced Materials Processing, Kyoto, 2006, p. 117
18. A. Borowiec, M. Mackenzie, G.C. Weatherly, H.K. Haugen, Appl. Phys. A 76, 201 (2003)
19. A. Borowiec, M. Mackenzie, G.C. Weatherly, H.K. Haugen, Appl. Phys. A 77, 411 (2003)
20. A. Borowiec, M. Couillard, G.A. Botton, H.K. Haugen, Appl. Phys. A 79, 1887 (2004)