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Volumn 18, Issue 5, 2010, Pages 4346-4355

Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; COATINGS; EXCIMER LASERS; FUSED SILICA; GAS LASERS; LASER PRODUCED PLASMAS; MULTILAYERS; OPTICAL TESTING; PLASMA SOURCES; SILICA; SUBSTRATES; ULTRAVIOLET DEVICES;

EID: 77749280021     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.004346     Document Type: Article
Times cited : (57)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.