Micro patterning of fused silica by ArF- and F2-laser ablation

Journal of Physics: Conference Series

Volumn 59, Issue 1, 2007, Pages 206-209

  Ihlemann, Jürgen ^a   Schulz Ruhtenberg, Malte ^a   Fricke Begemann, Thomas ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34547296331     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/59/1/045     Document Type: Article

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