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Volumn 17, Issue 25, 2009, Pages 23025-23036

Photo-thermal measurement of absorptance losses, temperature induced wavefront deformation and compaction in DUV-optics

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; COMPACTION; DEFORMATION; LASER BEAMS; RADIATION EFFECTS; REFRACTIVE INDEX; SILICA; TEMPERATURE DISTRIBUTION; THERMAL EXPANSION; WAVEFRONTS;

EID: 72049117949     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.023025     Document Type: Article
Times cited : (25)

References (12)
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  • 4
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  • 5
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    • Novel method to measure bulk absorption in optically transparent materials
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  • 6
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    • Comparative studies of absorptance behaviour of alkaline-earth fluorides at 193 nm and 157nm
    • C. Görling, U. Leinhos, and K. Mann, "Comparative studies of absorptance behaviour of alkaline-earth fluorides at 193 nm and 157nm," Appl. Phys. B 74(3), 259-265 (2002).
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  • 7
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  • 8
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    • Optical Materials: Compaction and rarefaction affect photolithography system lifetimes
    • J. M. Algots, C. Steinbrecher, H. Jinbo, S. Chuckravanen, "Optical Materials: Compaction and rarefaction affect photolithography system lifetimes," Laser Focus World, 41(11) (2005).
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  • 9
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    • Amplitude and phase beam characterization using a two-dimensional wavefront sensor
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  • 10
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    • Investigation of the propagation characteristics of excimer lasers using a Hartmann-Shack sensor
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  • 11
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    • Determination of beam parameters and coherence properties of laser radiation by use of an extended Hartmann-Shack wave-front sensor
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  • 12
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.