Formation and direct writing of color centers in LiF using a laser-induced extreme ultraviolet plasma in combination with a Schwarzschild objective

Review of Scientific Instruments

Volumn 76, Issue 10, 2005, Pages 1-5

  Barkusky, Frank ^a   Peth, Christian ^a   Mann, Klaus ^a   Feigl, Torsten ^b   Kaiser, Norbert ^b  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMETERS; MIRRORS; PLASMA APPLICATIONS; REFLECTION; ULTRAVIOLET RADIATION;

HIGH-ENERGY DENSITIES; SPHERICAL MIRROR SUBSTRATES; ULTRAVIOLET (EUV) SCHWARZSCHILD MIRROR;

LITHIUM COMPOUNDS;

EID: 27544436347     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2072147     Document Type: Review

References (20)

1. See, e.g., SPIE Microlithography 2005 Conference, San Jose, California, 27 February-4 March 2005 (unpublished).
2. U. Stamm, J. Phys. D 37, 3244 (2004).
3. V. Banine and R. Moors, J. Phys. D 37, 3207 (2004).
4. G. Baldacchini, S. Bollanti, IEEE J. Sel. Top. Quantum Electron. 10, 1435 (2004).
5. G. Baldacchini, F. Bonfigli, Radiat. Eff. Defects Solids 157, 569 (2002).
6. F. Bonfigli, A. Ya. Faenov, F. Flora, Phys. Status Solidi A 202, 250 (2005).
7. H. Gu and L. Qi, Opt. Commun. 210, 299 (2002).
8. H. Gu and H. Liu, Opt. Commun. 201, 113 (2002).
9. E. J. Caine and S. D. Miller, J. Vac. Sci. Technol. B 16, 3232 (1998).
10. G. Baldacchini, F. Bonfigli, J. Nanosci. Nanotechnol. 3, 483 (2003).
11. L. Juha, J. Krasa, Surf. Rev. Lett. 9, 347 (2002).
12. S. Kranzusch and K. Mann, Opt. Commun. 200, 223 (2001).
13. C. Peth, S. Kranzusch, K. Mann, and W. Viöl, Rev. Sci. Instrum. 75, 3288 (2004).
14. S. Kranzusch, C. Peth, and K. Mann, Rev. Sci. Instrum. 74, 969 (2003).
15. N. Benoit, S. Yulin, T. Feigl, and N. Kaiser, Physica B 357, 222 (2005).
16. B. Schäfer and K. Mann, Appl. Opt. 41, 2809 (2002).
17. B. Schäfer and K. Mann, Rev. Sci. Instrum. 71, 2663 (2000).
18. Oliver Lammel, Thesis, University of Regensburg, 2002.
19. R. M. Montereali, Radiat. Eff. Defects Solids 157, 545 (2002).
20. J. Nahum and D. A. Wiegand, Phys. Rev. 154, 817 (1967).