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Volumn 7361, Issue , 2009, Pages

Damage studies of multilayer optics for XUV free electron lasers

Author keywords

Damage; FLASH; Multilayer; Optics; XFEL

Indexed keywords

13.5 NM; ABLATION THRESHOLDS; DAMAGE; DAMAGE THRESHOLD; EX SITU; FEMTOSECONDS; FLASH; FREE ELECTRON; IN-SITU; INTERACTION PROCESS; IRREVERSIBLE DAMAGE; MO/SI MULTILAYER; MULTILAYER OPTICS; POWER DENSITIES; PULSE ENERGIES; REFLECTOMETRY; TIME-RESOLVED; TIME-SCALES; XFEL; XUV FREE-ELECTRON-LASER; XUV PULSE; XUV RADIATION;

EID: 69949147544     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.822257     Document Type: Conference Paper
Times cited : (20)

References (25)
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  • 9
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  • 10
    • 84960259042 scopus 로고    scopus 로고
    • ISBN 0-8194-5845-7, editor V. Bakshi (ISMT, Austin, TX
    • F. Bijkerk, in EUV sources for lithography; Vol. ISBN 0-8194-5845-7, editor V. Bakshi (ISMT, Austin, TX, 2006)
    • (2006) EUV Sources for Lithography
    • Bijkerk, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.