Role of polymer structure and ceiling temperature in polymer roughening and degradation during plasma processing: A beam system study of P4MS and PαMS

Journal of Physics D: Applied Physics

Volumn 43, Issue 8, 2010, Pages

  Nest, D ^a   Chung, T Y ^a   Vegh J J ^a   Graves, D B ^a   Bruce, R L ^b   Lin, T ^b   Phaneuf, R J ^b   Oehrlein, G S ^b   Long, B K ^c   Willson, C G ^c  

^a University of California   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

193 NM PHOTORESISTS; BEAM SYSTEM; CEILING TEMPERATURES; CRITICAL DIMENSION; CURRENT GENERATION; DIFFERENT STRUCTURE; ION FLUENCES; MAXIMUM TEMPERATURE; NEAR SURFACE REGIONS; NEXT GENERATION LITHOGRAPHY; PLASMA PROCESSING; POLYMER CHEMISTRY; POLYMER STRUCTURE; ROOM TEMPERATURE; SPUTTER YIELDS; VUV PHOTON; VUV RADIATION;

DEGRADATION; IONS; LITHOGRAPHY; METAL ANALYSIS; PHOTONS; PHOTORESISTS; PLASMA DEVICES; PLASMA DIAGNOSTICS; PLASMAS; RADIATION EFFECTS; SPUTTERING; STYRENE; SURFACE PROPERTIES; SURFACE ROUGHNESS;

ION BOMBARDMENT;

EID: 77149163780     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/8/085204     Document Type: Article

References (25)

1. Nest D, Graves D B, Engelmann S, Bruce R L, Weilnboeck F, Oehrlein G S, Andes C and Hudson E A 2008 Appl. Phys. Lett. 92 153113
2. Nest D, Chung T-Y, Graves D B, Engelmann S, Bruce R L, Weilnboeck F, Oehrlein G S, Wang D, Andes C and Hudson E A 2009 Plasma Process. Polym 6 649
3. Nest D 2009 PhD Thesis University of California, Berkeley
4. Titus M J, Nest D and Graves D B 2009 Appl. Phys. Lett. 94 171501
5. Pargon E, Martin M, Menguelti K, Azarnouche L, Foucher J and Joubert O 2009 Appl. Phys. Lett. 94 103111
6. Pargon E, Menguelti K, Martin M, Bazin A, Chaix-Pluchery O, Sourd C, Derrough S, Lill T and Joubert O 2009 J. Appl. Phys. 105 094902
7. Jinnai B, Koyama K, Kato K, Yasuda A, Momose H and Samukawa S 2009 J. Appl. Phys. 105 053309
8. Bruce R L, Engelmann S, Lin T, Kwon T, Phaneuf R J, Oehrlein G S, Long B K, Willson C G, Végh J J, Nest D, Graves D B and Alizadeh A 2009 J. Vac. Sci. Technol. B 27 1142
9. Dole M 1973 The Radiation Chemistry of Macromolecules (New York: Academic)
10. Brandrup J, Immergut E H, Grulke E A, Abe A and Bloch D R 1999 Polymer Handbook 4th edn (New York: Wiley)
11. Zekonyte J, Zaporojtchenko V and Faupel F 2005 Nucl. Instrum. Methods Phys. Res. B 236 241
12. Végh J J 2007 PhD Thesis University of California, Berkeley
13. Végh J J, Nest D, Graves D B, Bruce R, Engelmann S, Kwon T, Phaneuf R J, Oehrlein G S, Long B K and Willson C G 2007 Appl. Phys. Lett. 91 233113
14. Végh J J and Graves D B 2009 Plasma Process. Polym. 6 320
15. Gokan H, Esho S and Ohnishi Y 1983 J. Electrochem. Soc. 130 143
16. Chalmers J and Griffiths P 2002 Handbook of Vibrational Spectroscopy (New York: Wiley)
17. Bowden N, Brittain S, Evans A G, Hutchinson J W and Whitesides G M 1998 Nature 393 146
18. Bowden N, Huck W T S, Paul K E and Whitesides G M 1999 Appl. Phys. Lett. 75 2557
19. Chua D B H, Hg H T and Li S F Y 2000 Appl. Phys. Lett. 76 721
20. Chan E P and Crosby A J 2006 Soft Matter 2 324
21. Ohzono T and Shimomura M 2005 Japan. J. Appl. Phys. 44 1055
22. Huang R and Suo Z 2002 J. Appl. Phys. 91 1135
23. Huang R 2005 J. Mech. Phys. Solids 53 63
24. Im S H and Huang R 2005 J. Appl. Mech. 72 955
25. Huang R and Im S H 2006 Phys. Rev. E 74 026214