Integrated cantilever probes for SECM/AFM characterization of surfaces

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1537-1539

  Salomo, M ^a   Pust, S E ^b   Wittstock, G ^b   Oesterschulze, E ^a  

^a France   (Germany)

^b Department of Pure and Applied Chemistry   (Germany)

Author keywords

Atomic force microscopy; Combined probes; Scanning electrochemical microscopy

Indexed keywords

CANTILEVER PROBE; CANTILEVER SENSORS; ELECTROCHEMICAL SURFACES; FABRICATION PROCESS; HIGH SPATIAL RESOLUTION; SCANNING ELECTROCHEMICAL MICROSCOPY; SPATIAL RESOLUTION; SUBMICROMETERS; TOPOGRAPHICAL INFORMATION;

ATOMIC FORCE MICROSCOPY; ATOMS; ELECTROCHEMICAL PROPERTIES; IMAGE RESOLUTION; NANOCANTILEVERS; PROBES; SCANNING; SCANNING ELECTRON MICROSCOPY; SENSORS; SURFACE PROPERTIES;

ELECTROCHEMICAL ELECTRODES;

EID: 76949096573     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.032     Document Type: Article

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