Modified fabrication process for aperture probe cantilevers

Journal of Microscopy

Volumn 194, Issue 2-3, 1999, Pages 344-348

  Vollkopf, A ^a   Rudow, O ^a   Leinhos, T ^a   Mihalcea, C ^a   Oesterschulze, E ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Cantilevers; Fibre probes; Microfabricated near field tips; Scanning near field optical microscopy

Indexed keywords

MICROFABRICATION; NANOCANTILEVERS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL DATA STORAGE;

APERTURE PROBES; CANTILEVER; FABRICATION PROCESS; FIBRE PROBE; MICROFABRICATED; MICROFABRICATED NEAR-FIELD TIP; NEAR FIELDS; NUMERICAL CALCULATION; OPTICAL AND MECHANICAL PROPERTIES; SCANNING NEAR-FIELD OPTICAL MICROSCOPY;

PROBES;

CONFERENCE PAPER; MECHANICS; POLARIZATION; PRIORITY JOURNAL; RADIATION PHYSICS; SCANNING NEAR FIELD OPTICAL MICROSCOPY; SENSOR;

EID: 0032990824     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1999.00535.x     Document Type: Conference Paper

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