Chalcogenide glassy photoresists: History of development, properties, and applications

Physica Status Solidi (B) Basic Research

Volumn 246, Issue 8, 2009, Pages 1758-1767

  Lyubin, Victor ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 76949089003     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.200982003     Document Type: Article

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