Glasses for lithography

Journal of Non-Crystalline Solids

Volumn 354, Issue 12-13, 2008, Pages 1401-1406

  Jain, H ^a   Vlcek, M ^a  

^a Lehigh University   (United States)

Author keywords

Chalcogenides; Photoinduced effects

Indexed keywords

CHALCOGENIDES; CHEMICAL BONDS; ELECTRON BEAMS; LITHOGRAPHY; POLYMERIC GLASS;

CHALCOGENIDE GLASSES; PHOTOINDUCED EFFECTS; POLYMERIC RESISTS;

PHOTORESISTS;

EID: 38649095582     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.10.092     Document Type: Article

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